Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11035040 | Showerhead and substrate processing apparatus | Jin-young Bang, Hyuk-Jin Kim, Sung-Il Cho | 2021-06-15 |
| 10950419 | Shrouds and substrate treating systems including the same | Hyuk-Jin Kim, Daehyun Jang, Sung-Il Cho | 2021-03-16 |