Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137690 | Flows of optimization for patterning processes | — | 2021-10-05 |
| 11126077 | Patterning device, a method of making the same, and a patterning device design method | Jingjing Liu | 2021-09-21 |
| 11086230 | Method and apparatus for source mask optimization configured to increase scanner throughput for a patterning process | Jingjing Liu | 2021-08-10 |
| 11054750 | Profile aware source-mask optimization | Rafael C. Howell, Feng-Liang Liu | 2021-07-06 |
| 11022894 | Rule-based deployment of assist features | Kurt E. Wampler | 2021-06-01 |
| 10990003 | Binarization method and freeform mask optimization flow | Jingjing Liu, Rafael C. Howell, Xingyue PENG | 2021-04-27 |
| 10955755 | Optimization of assist features and source | Feng-Liang Liu | 2021-03-23 |