DR

Dirk Rudolph

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #473,301 of 548,734Top 90%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11028482 Use of voltage and current measurements to control dual zone ceramic pedestals Aaron Durbin, Ramesh Chandrasekharan, Thomas G. Jewell 2021-06-08