Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11028482 | Use of voltage and current measurements to control dual zone ceramic pedestals | Aaron Durbin, Ramesh Chandrasekharan, Thomas G. Jewell | 2021-06-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11028482 | Use of voltage and current measurements to control dual zone ceramic pedestals | Aaron Durbin, Ramesh Chandrasekharan, Thomas G. Jewell | 2021-06-08 |