Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204559 | High stability collimator assembly, lithographic apparatus, and method | Joseph Franklin, Jeffrey John Kowalski | 2021-12-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204559 | High stability collimator assembly, lithographic apparatus, and method | Joseph Franklin, Jeffrey John Kowalski | 2021-12-21 |