Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204559 | High stability collimator assembly, lithographic apparatus, and method | David Taub, Jeffrey John Kowalski | 2021-12-21 |
| 10941828 | Gas spring with travel control | Robert C. Fox | 2021-03-09 |