Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189454 | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system | Victor Brouk, Daniel J. Hoffman | 2021-11-30 |
| 11011349 | System, method, and apparatus for controlling ion energy distribution in plasma processing systems | Victor Brouk, Daniel J. Hoffman | 2021-05-18 |
| 10896807 | Synchronization between an excitation source and a substrate bias supply | Kevin Fairbairn, Denis Shaw | 2021-01-19 |