Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10962890 | Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method | Wilhelmus Franciscus Johannes Simons, Hans Butler, Hendrikus Herman Marie Cox, René Wilhelmus Antonius Hubertus LEENAARS, Stephan Christiaan Quintus Libourel +2 more | 2021-03-30 |