Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181829 | Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process | Cyrus E. Tabery, Hakki Ergün Cekli, Simon Hendrik Celine Van Gorp | 2021-11-23 |
| 11183434 | Methods of guiding process models and inspection in a manufacturing process | Yu Cao, Yi Zou | 2021-11-23 |
| 11086229 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Dag Sonntag, Hakki Ergün Cekli +9 more | 2021-08-10 |