Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069535 | Atomic layer etch of tungsten for enhanced tungsten deposition fill | Keren Jacobs Kanarik, Samantha Tan, Anand Chandrashekar, Teh-Tien Su, Wenbing Yang +2 more | 2021-07-20 |
CL
Chiukin Steven Lai
Overall (2021): #499,425 of 548,734Top 95%
1
Patents 2021