Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11173439 | Flow path switching type collecting apparatus of by-product for semiconductor manufacturing process | Jae-Jun Lee, Myung Pil Han | 2021-11-16 |
| 11117086 | Apparatus for collecting by-product of semiconductor manufacturing process | Jae-Jun Lee, Myung Pil Han | 2021-09-14 |
| 11054174 | Semiconductor process by-product collecting device | Kyu Hyun Hwang, Nak Jin Choi, Tae Yeon Kim, Kyung Tae Kim | 2021-07-06 |
| 10987619 | Apparatus for collecting by-product in semiconductor manufacturing process | Pyung Hee Son, Ye Jin Kim, Ji Su Kim | 2021-04-27 |