Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11173439 | Flow path switching type collecting apparatus of by-product for semiconductor manufacturing process | Che Hoo Cho, Jae-Jun Lee | 2021-11-16 |
| 11117086 | Apparatus for collecting by-product of semiconductor manufacturing process | Che Hoo Cho, Jae-Jun Lee | 2021-09-14 |