Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11017995 | Composition for TiN hard mask removal and etch residue cleaning | Yi-Chia Lee, Wen Dar Liu, Chung-Yi Chang | 2021-05-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11017995 | Composition for TiN hard mask removal and etch residue cleaning | Yi-Chia Lee, Wen Dar Liu, Chung-Yi Chang | 2021-05-25 |