Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199782 | Lithographic process and apparatus and inspection process and apparatus | Wim Tjibbo Tel, Hans Erik KATTOUW, Valerio ALTINI | 2021-12-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199782 | Lithographic process and apparatus and inspection process and apparatus | Wim Tjibbo Tel, Hans Erik KATTOUW, Valerio ALTINI | 2021-12-14 |