Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201040 | Substrate supporting unit and film forming device having the substrate supporting unit | Go Takahara, Toshihiko Hanamachi | 2021-12-14 |
| 11052455 | Caulking jig and manufacturing method using same | Satoshi Hirano, Takatoshi Nanbu | 2021-07-06 |