Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201040 | Substrate supporting unit and film forming device having the substrate supporting unit | Go Takahara, Arata Tatsumi | 2021-12-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201040 | Substrate supporting unit and film forming device having the substrate supporting unit | Go Takahara, Arata Tatsumi | 2021-12-14 |