Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11208319 | Method for manufacturing a MEMS unit for a micromechanical pressure sensor | Joachim Fritz, Thomas Friedrich, Torsten Kramer | 2021-12-28 |
| 11059717 | Micromechanical pressure sensor and method for producing said micromechanical pressure sensor | Tobias Henn | 2021-07-13 |
| 11060937 | Micromechanical pressure sensor | Ferenc Lukacs, Friedjof Heuck, Helmut Grutzeck, Mike Schwarz, Robert Maul +3 more | 2021-07-13 |
| 10988377 | Method for producing a stress-decoupled micromechanical pressure sensor | Torsten Kramer, Joachim Fritz, Thomas Friedrich | 2021-04-27 |