Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11208319 | Method for manufacturing a MEMS unit for a micromechanical pressure sensor | Arne Dannenberg, Joachim Fritz, Thomas Friedrich | 2021-12-28 |
| 10988377 | Method for producing a stress-decoupled micromechanical pressure sensor | Arne Dannenberg, Joachim Fritz, Thomas Friedrich | 2021-04-27 |
| 10950455 | Method for manufacturing a semiconductor device and semiconductor device | Zhenyu Wu, Jens Schindele | 2021-03-16 |