Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127599 | Methods for etching a hardmask layer | Shan Jiang, Gene S. Lee, Zohreh Hesabi | 2021-09-21 |
| 10957558 | Methods of etching metal-containing layers | Gene Lee, Abhijit Patil, Shan Jiang, Zohreh Hesabi | 2021-03-23 |