Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127599 | Methods for etching a hardmask layer | Shan Jiang, Akhil Mehrotra, Zohreh Hesabi | 2021-09-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127599 | Methods for etching a hardmask layer | Shan Jiang, Akhil Mehrotra, Zohreh Hesabi | 2021-09-21 |