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Aaron Durbin

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #546,656 of 548,734Top 100%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11028482 Use of voltage and current measurements to control dual zone ceramic pedestals Ramesh Chandrasekharan, Dirk Rudolph, Thomas G. Jewell 2021-06-08