Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923405 | Wafer processing equipment having capacitive micro sensors | Leonard Tedeschi, Kartik Ramaswamy, Daniel T. McCormick | 2021-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923405 | Wafer processing equipment having capacitive micro sensors | Leonard Tedeschi, Kartik Ramaswamy, Daniel T. McCormick | 2021-02-16 |