Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107786 | Pattern decomposition lithography techniques | Charles H. Wallace, Elliot N. Tan, Swaminathan Sivakumar, Oleg Golonzka, Robert M. Bigwood | 2021-08-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107786 | Pattern decomposition lithography techniques | Charles H. Wallace, Elliot N. Tan, Swaminathan Sivakumar, Oleg Golonzka, Robert M. Bigwood | 2021-08-31 |