Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10976670 | Apparatus and method for detecting optimal focal plane of lithographic projection objective lens | Jiajun XU, Zhixiang Jason Liu, Wumei Lin | 2021-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10976670 | Apparatus and method for detecting optimal focal plane of lithographic projection objective lens | Jiajun XU, Zhixiang Jason Liu, Wumei Lin | 2021-04-13 |