Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11097414 | Monitoring of surface touch points for precision cleaning | Eden Rephaeli, Guy Satat, Daniel Lam, Benjamin Holson | 2021-08-24 |
| 10976670 | Apparatus and method for detecting optimal focal plane of lithographic projection objective lens | Zhixiang Jason Liu, Tingwen Xing, Wumei Lin | 2021-04-13 |