Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099482 | Adapting the duration of exposure slots in multi-beam writers | Christoph Spengler, Wolf Naetar | 2021-08-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099482 | Adapting the duration of exposure slots in multi-beam writers | Christoph Spengler, Wolf Naetar | 2021-08-24 |