CS

Christoph Spengler

IG Ims Nanofabrication Gmbh: 1 patents #1 of 3Top 35%
Overall (2021): #495,168 of 548,734Top 95%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11099482 Adapting the duration of exposure slots in multi-beam writers Gottfried Hochleitner, Wolf Naetar 2021-08-24