Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094501 | Secondary charged particle imaging system | Matthias Firnkes, Florian Lampersberger | 2021-08-17 |
| 10991544 | Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen | Matthias Firnkes, John Breuer, Florian Lampersberger, Hanno Kaupp | 2021-04-27 |