Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177114 | Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam device, and method of reducing an electrical field strength in an electrode arrangement | Matthias Firnkes, Carlo Salvesen | 2021-11-16 |
| 11094501 | Secondary charged particle imaging system | Matthias Firnkes, Stefan Lanio | 2021-08-17 |
| 10991544 | Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen | Matthias Firnkes, John Breuer, Hanno Kaupp, Stefan Lanio | 2021-04-27 |