Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10927462 | Gas control system and film formation apparatus provided with gas control system | Hiroshi Nishizato, Yuhei SAKAGUCHI | 2021-02-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10927462 | Gas control system and film formation apparatus provided with gas control system | Hiroshi Nishizato, Yuhei SAKAGUCHI | 2021-02-23 |