Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10927462 | Gas control system and film formation apparatus provided with gas control system | Masakazu Minami, Yuhei SAKAGUCHI | 2021-02-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10927462 | Gas control system and film formation apparatus provided with gas control system | Masakazu Minami, Yuhei SAKAGUCHI | 2021-02-23 |