Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081312 | Method of manufacturing emitter, emitter, and focused ion beam apparatus | Tomokazu Kozakai, Hiroyuki Mutoh, Yoko Nakajima, Hironori Moritani, Shinichi Matsubara | 2021-08-03 |
| 10971329 | Field ionization source, ion beam apparatus, and beam irradiation method | Shinichi Matsubara, Hiroyasu Shichi, Tomihiro Hashizume | 2021-04-06 |