Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081312 | Method of manufacturing emitter, emitter, and focused ion beam apparatus | Tomokazu Kozakai, Yoshimi Kawanami, Hiroyuki Mutoh, Yoko Nakajima, Shinichi Matsubara | 2021-08-03 |