Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112701 | Control device, control method, lithographic apparatus, method of manufacturing article, and storage medium | Mitsuhide Nishimura | 2021-09-07 |
JM
Junichi Motojima
Overall (2021): #387,064 of 548,734Top 75%
1
Patents 2021