Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112701 | Control device, control method, lithographic apparatus, method of manufacturing article, and storage medium | Junichi Motojima | 2021-09-07 |
| 11048176 | Substrate processing apparatus and article manufacturing method | Kenichi Kamino, Kashu Matsumoto | 2021-06-29 |