Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156917 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Mitsuhiro Fujita, Takumi Tanaka, Keishi YAMAMOTO, Akiyoshi GOTO, Keita Kato | 2021-10-26 |
| 11073762 | Actinic ray-sensitive or radiation sensitive resin composition, actinic raysensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, and photoacid generator | Daisuke ASAKAWA, Akiyoshi GOTO, Masafumi KOJIMA, Keita Kato, Keiyu OU | 2021-07-27 |
| 11067890 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Masafumi KOJIMA, Akira Takada, Keita Kato | 2021-07-20 |