Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156917 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Kyohei Sakita, Mitsuhiro Fujita, Takumi Tanaka, Akiyoshi GOTO, Keita Kato | 2021-10-26 |