Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10926374 | Substrate processing apparatus | Hiroyuki Shinozaki, Shuichi Kamata, Koichi Takeda | 2021-02-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10926374 | Substrate processing apparatus | Hiroyuki Shinozaki, Shuichi Kamata, Koichi Takeda | 2021-02-23 |