Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11065734 | Film thickness measuring device and polishing device | — | 2021-07-20 |
| 10926374 | Substrate processing apparatus | Shuichi Kamata, Koichi Takeda, Ryuichi Kosuge | 2021-02-23 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11065734 | Film thickness measuring device and polishing device | — | 2021-07-20 |
| 10926374 | Substrate processing apparatus | Shuichi Kamata, Koichi Takeda, Ryuichi Kosuge | 2021-02-23 |