Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10966308 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Richard L. Sandstrom, Daniel John William Brown | 2021-03-30 |
| 10955749 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodriges Nunes, Alexander I. Ershov, Kornelis Frits Feenstra +13 more | 2021-03-23 |