Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10966308 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov | 2021-03-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10966308 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov | 2021-03-30 |