Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11111600 | Process chamber with resistive heating | Visweswaren Sivaramakrishnan | 2021-09-07 |
| 11041253 | Silicon wafers by epitaxial deposition | Visweswaren Sivaramakrishnan, Andrzej Kaszuba, Quoc Truong, Jean R. Vatus | 2021-06-22 |
| 10961621 | CVD reactor chamber with resistive heating and substrate holder | Visweswaren Sivaramakrishnan, Timothy N. Kleiner, Quoc Truong | 2021-03-30 |
| 10947640 | CVD reactor chamber with resistive heating for silicon carbide deposition | Visweswaren Sivaramakrishnan | 2021-03-16 |