Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049729 | Dry etching method, semiconductor device manufacturing method, and chamber cleaning method | Akifumi Yao | 2021-06-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049729 | Dry etching method, semiconductor device manufacturing method, and chamber cleaning method | Akifumi Yao | 2021-06-29 |