Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049729 | Dry etching method, semiconductor device manufacturing method, and chamber cleaning method | Shoi SUZUKI | 2021-06-29 |
| 10957554 | Etching method and etching device | Kunihiro Yamauchi, Takashi Masuda | 2021-03-23 |
| 10926211 | Method for purifying fluorine compound gas | Kohei Ooya, Yuta Takeda, Jun Eto | 2021-02-23 |