Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11169359 | Method for positioning a component of an optical system | Pascal Marsollek | 2021-11-09 |
| 11092897 | Method for producing a mirror as an optical component for an optical system of a projection exposure apparatus for projection lithography | — | 2021-08-17 |
| 10989897 | Optical element for the beam guidance of imaging light in projection lithography | Marwene Nefzi | 2021-04-27 |
| 10890850 | Optical imaging arrangement with actively adjustable metrology support units | Bernhard Geuppert, Jens Kugler | 2021-01-12 |