Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10989897 | Optical element for the beam guidance of imaging light in projection lithography | Stefan Hembacher | 2021-04-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10989897 | Optical element for the beam guidance of imaging light in projection lithography | Stefan Hembacher | 2021-04-27 |