Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137688 | Optical system for transferring original structure portions of a lithography mask, projection optical unit for imaging an object field in which at least one original structure portion of the lithography mask is arrangeable, and lithography mask | Johannes Ruoff | 2021-10-05 |
| 10928733 | Illumination optic for projection lithography | — | 2021-02-23 |
| 10928734 | Optical assembly for guiding an output beam of a free electron laser | — | 2021-02-23 |