Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137688 | Optical system for transferring original structure portions of a lithography mask, projection optical unit for imaging an object field in which at least one original structure portion of the lithography mask is arrangeable, and lithography mask | Michael Patra | 2021-10-05 |
| 11119413 | Imaging optical unit for imaging an object field into an image field | Susanne Beder, Hans-Juergen Rostalski, Alexander Wolf | 2021-09-14 |