Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139140 | Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus | Dirk Preikszas | 2021-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139140 | Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus | Dirk Preikszas | 2021-10-05 |