Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139140 | Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus | Michael Albiez | 2021-10-05 |
| 11087949 | Particle-optical apparatus and particle beam system | Bernd Hafner | 2021-08-10 |