Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187979 | Imprint apparatus, imprint method, and article manufacturing method | Setsuo Yoshida | 2021-11-30 |
| 11143956 | Ejection device and imprint apparatus | Hisashi Namba, Ken Katsuta | 2021-10-12 |
| 11097545 | Liquid ejection device, cleaning apparatus and cleaning method for module substrate | Akiko Iimura, Hisashi Namba, Masahiro Kuri | 2021-08-24 |
| 10919195 | Imprint apparatus and method of manufacturing article | Kazuhiro Sato, Takahiro Matsumoto | 2021-02-16 |